MARC状态：已编 文献类型：西文图书 浏览次数：15
- 题名/责任者:
- Electromechanics and MEMS / Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology.
- 出版发行项:
- Cambridge : Cambridge University Press, 2012.
- ISBN:
- 9781139602877
- ISBN:
- 9780521764834
- 载体形态项:
- 1 online resource (559 pages) : illustrations
- 个人责任者:
- Jones, T. B. (Thomas Byron), 1944-
- 附加个人名称:
- Nenadic, Nenad G.
- 中图法分类号:
- TN4
- 一般附注:
- Description based on print version record.
- 书目附注:
- Includes bibliographical references.
- 内容附注:
- Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS.
- 摘要附注:
- "Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"--Provided by publisher.
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