机读格式显示(MARC)

• 000 01085nam 2200325 a 4500

• 000 1000077302

• 001 0000301195

• 005 20050805091501.0

• 008 010822s2002 maua b 001 0 eng

• 010 __ |a 2001044737

• 020 __ |a 0072393912 (alk. paper) : |c CNY200.00

• 040 __ |a DLC |c DLC |d CIN

• 050 00 |a TK7874 |b .H794 2002

• 082 00 |a 621.381 |2 21

• 090 __ |a TN40/HTR

• 093 __ |a TN40 |2 4

• 099 __ |a CAL 022005085658

• 100 1_ |a Hsu, Tai-Ran.

• 245 10 |a MEMS & microsystems : |b design and manufacture / |c Tai-Ran Hsu.

• 246 30 |a MEMS and microsystems : |b design and manufacture

• 260 __ |a Boston : |b McGraw-Hill, |c c2002.

• 300 __ |a xii, 436 p. : |b ill. ; |c 24 cm.

• 504 __ |a Includes bibliographical references (p. 427-431) and index.

• 650 _0 |a Microelectronic packaging.

• 650 _0 |a Microelectronics.

• 650 _0 |a Microelectromechanical systems.

• 901 __012005010191

• 905 __ |a CAU |f TN40/HTR |b W0074109(or.)

• 907 __ |a CAU |f TN40/HTR |b W0074109(or.)

• 999 __ |t C |A wzhlc |a 20050805 09:09:46 |I wzhlc |i 20050805 09:15:01 |G wzhlc |g 20050805 09:15:2