机读格式显示(MARC)

• 000 01036nam 2200301 a 4500

• 000 1000074679

• 001 0000298755

• 005 20030522154958.0

• 008 010927s2002 flua b 001 0 eng

• 010 __ |a 2001049944

• 020 __ |a 0849312620 (alk. paper) : |c CNY1195.40

• 040 __ |a DLC |c DLC

• 050 00 |a TK7875 |b .L9597 2001

• 082 00 |a 621.381 |2 21

• 090 __ |a TN4/LSE

• 093 __ |a TN4 |2 4

• 099 __ |a CAL 022002178408

• 100 1_ |a Lyshevski, Sergey Edward.

• 245 10 |a MEMS and NEMS : |b systems, devices, and structures / |c Sergey Edward Lyshevski.

• 260 __ |a Boca Raton, FL : |b CRC Press, |c 2002.

• 300 __ |a 461 p. : |b ill. ; |c 25 cm.

• 440 _0 |a Nano- and microscience, engineering, technology, and medicine series

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectromechanical systems.

• 901 __022003000633

• 905 __ |a CAU |f TN4/LSE |b W0069475(or.)

• 907 __ |a CAU |f TN4/LSE |b W0069475(or.)

• 999 __ |t C |A wzus |a 20030522 14:32:09 |I wzus |i 20030522 15:49:58 |G wzus |g 20030530 11:08:1