MARC状态:已编 文献类型:西文图书 浏览次数:68
- 题名/责任者:
- MEMS & microsystems : design and manufacture / Tai-Ran Hsu.
- 出版发行项:
- Boston : McGraw-Hill, c2002.
- ISBN:
- 0072393912 (alk. paper) :
- 载体形态项:
- xii, 436 p. : ill. ; 24 cm.
- 变异题名:
- MEMS and microsystems : design and manufacture
- 个人责任者:
- Hsu, Tai-Ran.
- 论题主题:
- Microelectronics.
- 中图法分类号:
- TN40
- 书目附注:
- Includes bibliographical references (p. 427-431) and index.
- 随书光盘:
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